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- Zimmer, FabianFraunhofer IPMS (author)
Very large scale heterogeneous system integration for 1-megapixel mono-crystalline silicon micro-mirror array on CMOS driving electronics
- Article/chapterEnglish2011
Publisher, publication year, extent ...
- 2011
- printrdacarrier
Numbers
- LIBRIS-ID:oai:DiVA.org:kth-124540
- https://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-124540URI
- https://doi.org/10.1109/MEMSYS.2011.5734530DOI
Supplementary language notes
- Language:English
- Summary in:English
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- SwePubSwePub
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Notes
- QC 20130916
- In this paper we demonstrate the first high mirror-count 1-level spatial light modulator (SLM) chip with 1 million tilting micro-mirrors made of mono-crystalline silicon on analogue, high-voltage CMOS driving electronics. The device from a feasibility study shows good optical and excellent mechanical properties. The micro-mirrors exhibit excellent surface properties with a surface roughness below 1 nm RMS, actuated micro-mirrors show no imprinting behavior and operate drift-free. Very large scale heterogeneous system integration was used to fabricate the micro-mirror array; the process is presented in this paper together with a characterization of the fabricated device.
Subject headings and genre
- Crystalline silicons
- Drift-free
- Fabricated device
- Feasibility studies
- Heterogeneous systems
- High-voltages
- Mega-pixel
- Micro mirror
- Micromirror array
- Spatial light modulators
Added entries (persons, corporate bodies, meetings, titles ...)
- Lapisa, MartinKTH,Mikro- och nanosystemteknik(Swepub:kth)u10vt4i3 (author)
- Bakke, ThorSINTEF, Norway (author)
- Bring, MartinFraunhofer IPMS (author)
- Stemme, GöranKTH,Mikro- och nanosystemteknik(Swepub:kth)u1oyebfq (author)
- Niklaus, FrankKTH,Mikro- och nanosystemteknik(Swepub:kth)u1bcu8r2 (author)
- Fraunhofer IPMSMikro- och nanosystemteknik (creator_code:org_t)
Related titles
- In:2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS), s. 736-7399781424496327
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- Royal Institute of Technology
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