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Highly efficient no...
Highly efficient nonuniform grating coupler for silicon-on-insulator nanophotonic circuits
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- Tang, Yongbo (author)
- KTH,Mikroelektronik och tillämpad fysik, MAP,Zhejiang-KTH Joint Research Center of Photonics, JORCEP
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- Wang, Zhechao (author)
- KTH,Mikroelektronik och tillämpad fysik, MAP,Zhejiang-KTH Joint Research Center of Photonics, JORCEP
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- Wosinski, Lech (author)
- KTH,Mikroelektronik och tillämpad fysik, MAP,Zhejiang-KTH Joint Research Center of Photonics, JORCEP
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- Westergren, Urban (author)
- KTH,Mikroelektronik och tillämpad fysik, MAP,Zhejiang-KTH Joint Research Center of Photonics, JORCEP
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- He, Sailing (author)
- KTH,Mikroelektronik och tillämpad fysik, MAP,Zhejiang-KTH Joint Research Center of Photonics, JORCEP
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(creator_code:org_t)
- 2010
- 2010
- English.
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In: Optics Letters. - 0146-9592 .- 1539-4794. ; 35:8, s. 1290-1292
- Related links:
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http://www.opticsinf...
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
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- We present design, fabrication, and characterization of a silicon-on-insulator grating coupler of high efficiency for coupling between a silicon nanophotonic waveguide and a single mode fiber. By utilizing the lag effect of the dry etching process, a grating coupler consisting of nonuniform grooves with different widths and depths is designed and fabricated to maximize the overlapping between the upward wave and the fiber mode. The measured waveguide-to-fiber coupling efficiency of 64% (−1.9 dB) for the transverse electric polarization is achieved by the present nonuniform grating coupler directly defined on a regular silicon-on-insulator wafer.
Publication and Content Type
- ref (subject category)
- art (subject category)
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