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Fabrication of elec...
Fabrication of electrically-pumped resonance-cavity membrane-reflector surface-emitters on silicon
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Fan, W. (author)
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Zhao, D. (author)
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Chuwongin, S. (author)
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Seo, J. -H (author)
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Yang, H. (author)
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- Berggren, Jesper (author)
- KTH,Integrerade komponenter och kretsar
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- Hammar, Mattias (author)
- KTH,Integrerade komponenter och kretsar
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Ma, Z. (author)
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Zhou, W. (author)
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(creator_code:org_t)
- 2013
- 2013
- English.
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In: 2013 IEEE Photonics Conference (IPC). - 9781457715075 ; , s. 643-644
- Related links:
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Subject headings
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- Various lasers and light sources on Si via heterogeneous integration of Si/III-V have been reported based on direct growth on Si [1] or wafer bonding technology [2-4]. We reported earlier optically-pumped Si membrane-reflector vertical-cavity surface-emitting lasers (MRVCSELs) fabricated by low-temperature membrane transfer printing processes [5, 6]. Here we report electrically-pumped devices based on an intra-cavity contact configuration.
Keyword
- Direct growth
- Electrically-pumped
- Heterogeneous integration
- Intracavities
- Low temperatures
- Membrane transfers
- Vertical-cavity surface emitting laser
- Waferbonding technology
Publication and Content Type
- ref (subject category)
- kon (subject category)
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