Search: onr:"swepub:oai:DiVA.org:kth-143306" >
3D printing of sili...
3D printing of silicon micro and nano structures by ion implantation, silicon deposition, and selective silicon etching
-
- Fischer, Andreas C. (author)
- KTH,Mikro- och nanosystemteknik
-
- Niklaus, Frank (author)
- KTH,Mikro- och nanosystemteknik
-
- Gylfason, Kristinn Björgvin (author)
- KTH,Mikro- och nanosystemteknik
-
show more...
-
- Stemme, Göran (author)
- KTH,Mikro- och nanosystemteknik
-
show less...
-
(creator_code:org_t)
- 2013
- 2013
- English.
-
In: Technical Paper - Society of Manufacturing Engineers.
- Related links:
-
https://urn.kb.se/re...
Abstract
Subject headings
Close
- A method for additive layer-by-layer fabrication of arbitrarily shaped 3D silicon micro and nano structures is reported. The fabrication is based on alternating steps of chemical vapor deposition of silicon and local implantation of gallium ions by focused ion beam (FIB) writing. In a final step, the defined 3D structures are formed by etching the silicon in potassium hydroxide (KOH), in which the local ion implantation provides the etching selectivity. The proposed technology could change and greatly simplify the fabrication of many MEMS, NEMS, and silicon photonic devices without requiring a fully equipped semiconductor cleanroom. This layer-by-layer fabrication method is in principle also viable for the implementation of 3D structures in semiconductors other than silicon.
Keyword
- 3D printing
- Focused ion beam
- Ion implantation
- Layered fabrication
- Microstructures
- Nanostructures
- Silicon
Publication and Content Type
- ref (subject category)
- kon (subject category)
To the university's database