onr:"swepub:oai:DiVA.org:kth-143306"
Search: onr:"swepub:oai:DiVA.org:kth-143306" > 3D printing of sili...
- 1 of 1
- Previous record
- Next record
- To hitlist
| Fältnamn | Indikatorer | Metadata |
|---|---|---|
| 000 | 02189naa a2200361 4500 | |
| 001 | oai:DiVA.org:kth-143306 | |
| 003 | SwePub | |
| 008 | 140319s2013 | |||||||||||000 ||eng| | |
| 024 | 7 | a https://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-1433062 URI |
| 040 | a (SwePub)kth | |
| 041 | a engb eng | |
| 042 | 9 SwePub | |
| 072 | 7 | a ref2 swepub-contenttype |
| 072 | 7 | a kon2 swepub-publicationtype |
| 100 | 1 | a Fischer, Andreas C.u KTH,Mikro- och nanosystemteknik4 aut0 (Swepub:kth)u1pfkzjx |
| 245 | 1 0 | a 3D printing of silicon micro and nano structures by ion implantation, silicon deposition, and selective silicon etching |
| 264 | 1 | c 2013 |
| 338 | a print2 rdacarrier | |
| 500 | a QC 20140320 | |
| 520 | a A method for additive layer-by-layer fabrication of arbitrarily shaped 3D silicon micro and nano structures is reported. The fabrication is based on alternating steps of chemical vapor deposition of silicon and local implantation of gallium ions by focused ion beam (FIB) writing. In a final step, the defined 3D structures are formed by etching the silicon in potassium hydroxide (KOH), in which the local ion implantation provides the etching selectivity. The proposed technology could change and greatly simplify the fabrication of many MEMS, NEMS, and silicon photonic devices without requiring a fully equipped semiconductor cleanroom. This layer-by-layer fabrication method is in principle also viable for the implementation of 3D structures in semiconductors other than silicon. | |
| 653 | a 3D printing | |
| 653 | a Focused ion beam | |
| 653 | a Ion implantation | |
| 653 | a Layered fabrication | |
| 653 | a Microstructures | |
| 653 | a Nanostructures | |
| 653 | a Silicon | |
| 700 | 1 | a Niklaus, Franku KTH,Mikro- och nanosystemteknik4 aut0 (Swepub:kth)u1bcu8r2 |
| 700 | 1 | a Gylfason, Kristinn Björgvinu KTH,Mikro- och nanosystemteknik4 aut0 (Swepub:kth)u1v3y7u7 |
| 700 | 1 | a Stemme, Göranu KTH,Mikro- och nanosystemteknik4 aut0 (Swepub:kth)u1oyebfq |
| 710 | 2 | a KTHb Mikro- och nanosystemteknik4 org |
| 773 | 0 | t Technical Paper - Society of Manufacturing Engineers |
| 856 | 4 8 | u https://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-143306 |
To the university's database
- 1 of 1
- Previous record
- Next record
- To hitlist
Find more in SwePub
- By the author/editor
- Fischer, Andreas ...
- Niklaus, Frank
- Gylfason, Kristi ...
- Stemme, Göran
- Articles in the publication
- Technical Paper ...
- By the university
- Royal Institute of Technology
Search outside SwePub
- Extend your search to:
- Google Book Search
- Google Scholar
Kungliga biblioteket hanterar dina personuppgifter i enlighet med EU:s dataskyddsförordning (2018), GDPR. Läs mer om hur det funkar här.
Så här hanterar KB dina uppgifter vid användning av denna tjänst.
- Copyright © LIBRIS - National Library Systems
- LIBRIS.kb.se
