Design of micromachined ridge gap waveguides for millimeter-wave applications

• The ridge gap waveguide is a new transmission line for millimeter-wave applications. Traditionally, rectangular waveguides are used for those applications due to their low loss. However their fabrication requires precision machining, very good electrical contact and alignment between two joining mechanical parts. Ridge gap waveguides can obtain similar performance without requiring conductive sidewalls and this provides more freedom during the fabrication and assembly process as the structure is no longer sensitive to small gaps between the side walls and the upper lid. The ridge gap waveguide has already been validated for 10-20 GHz using conventional fabrication methods. The ridge gap waveguide prototypes presented in this paper are designed to work in the frequency region between 210 and 340 GHz, and fabricated using MEMS technology. MEMS technology provides fabrication precision of the structures and thus opens the path for high-frequency components.

Subject headings

TEKNIK OCH TEKNOLOGIER  -- Medicinteknik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Medical Engineering (hsv//eng)

TEKNIK OCH TEKNOLOGIER  -- Annan teknik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Other Engineering and Technologies (hsv//eng)

TEKNIK OCH TEKNOLOGIER  -- Elektroteknik och elektronik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)

Keyword

GHz

High-frequency

MEMS

Resonator

RF

Waveguides

Assembly process

Electrical contacts

Fabrication method

Frequency regions

High frequency components

High frequency HF

Low loss

Mechanical parts

MEMS technology

Micromachined

Millimeter-wave applications

Precision machining

Side walls

Small gaps

Transmission line

Fabrication

Millimeter waves

Precision engineering

Resonators

Ridge waveguides

Publication and Content Type

ref (subject category)

kon (subject category)