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Compacted nanoscale...
Compacted nanoscale sensors by merging ZnO nanorods with interdigitated electrodes
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Wang, Q. (author)
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Rihtnesberg, D. B. (author)
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Bergström, A. (author)
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Almqvist, S. (author)
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Zhang, A. Z. Z. (author)
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Kaplan, W. (author)
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Andersson, J. Y. (author)
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- Sugunan, Abhilash (author)
- KTH,Funktionella material, FNM
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- Yang, Xuran (author)
- KTH,Funktionella material, FNM
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- Toprak, Muhammet (author)
- KTH,Funktionella material, FNM
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(creator_code:org_t)
- SPIE, 2011
- 2011
- English.
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In: Proc SPIE Int Soc Opt Eng. - : SPIE. - 9780819486059
- Related links:
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Subject headings
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- ZnO nanorods (NRs) sensors utilizing hybrid or monolithic integration of the NRs on nanoscale or microscale interdigitated electrodes (IDEs) were fabricated and characterized. The IDEs with their finger electrode width ranging from 50 nm to 3 μm were formed on SiO2/Si substrates by nanoimprint lithography or conventional photolithography and metallization techniques, whereas the ZnO NRs were grown by chemical synthesis method. The average diameter of the ZnO NRs is about 100 nm, and their length can be varied from 2 to 5 μm by controlling growth time. When sensing targets, such as molecules or nanoparticles, bind onto the ZnO NRs, the conductance between IDEs will change. As probing test, II-VI quantum dots (QDs) were attached on the ZnO NRs, and clear responses were obtained by measuring and comparing current-voltage (I-V) characteristic of the sensor before and after binding the QDs.
Subject headings
- NATURVETENSKAP -- Fysik -- Annan fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Other Physics Topics (hsv//eng)
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Keyword
- chemical synthesis
- interdigitated electrodes and nanoimprint lithography
- ZnO nanorods
- Average diameter
- Conventional photolithography
- Finger electrode
- Growth time
- II-VI quantum dots
- Inter-digitated electrodes
- Metallization techniques
- Micro-scales
- Monolithic integration
- Nano scale
- Nanoscale sensors
- ZnO
- ZnO nanorod
- Electrodes
- Monolithic integrated circuits
- Nanoimprint lithography
- Nanorods
- Nanostructured materials
- Nanotechnology
- Photolithography
- Semiconductor quantum dots
- Silicon compounds
- Synthesis (chemical)
- Zinc oxide
- Sensors
Publication and Content Type
- ref (subject category)
- kon (subject category)
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- By the author/editor
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Wang, Q.
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Rihtnesberg, D. ...
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Bergström, A.
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Almqvist, S.
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Zhang, A. Z. Z.
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Kaplan, W.
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show more...
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Andersson, J. Y.
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Sugunan, Abhilas ...
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Yang, Xuran
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Toprak, Muhammet
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show less...
- About the subject
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- NATURAL SCIENCES
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NATURAL SCIENCES
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and Physical Science ...
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and Other Physics To ...
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- ENGINEERING AND TECHNOLOGY
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ENGINEERING AND ...
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and Electrical Engin ...
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and Other Electrical ...
- Articles in the publication
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Proc SPIE Int So ...
- By the university
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Royal Institute of Technology