Novel integration concepts for sige-based rf-MOSFETs

• An overview of critical integration issues for future generation rf-MOSFETs is presented. The process requirements and implementation of selective epitaxy for the source and drain regions is given. In-situ doping of highly boron doped recessed SiGe S/D is demonstrated. Channel region engineering is discussed and 50 nm strained SiGe pMOSFETs are demonstrated. Implementation of high-κ gate dielectrics is presented and device performance is demonstrated for surface channel MOSFETs with a gate stack based on ALD-formed HfO2/Al 2O3. Low frequency noise properties for those devices are analyzed. Contact metallization issues are critical for ultra scaled devices and here the implementation of NiSi on SiGe(C) regions as well as on ultra thin body SOI MOSFETs are presented. Finally, a spacer pattering technology using optical lithography to fabricate sub-50 nm high-frequency MOSFETs is demonstrated.

Subject headings

TEKNIK OCH TEKNOLOGIER  -- Elektroteknik och elektronik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)

Keyword

Doping (additives)

Epitaxial growth

Metallizing

Process engineering

Semiconducting germanium compounds

Semiconducting silicon compounds

Process integration

Selective epitaxy

Spacer patterning technology

MOSFET devices

Publication and Content Type

ref (subject category)

kon (subject category)