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Planarization of epitaxial SiC trench structures by plasma ion etching
- Zhang, Andy Zhenzhong (author)
- Reshanov, Sergey A. (author)
- Schöner, Adolf (author)
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- Kaplan, Wlodek (author)
- Kwietniewski, N. (author)
- Lim, Jang-Kwon (author)
- Bakowski, Mietek (author)
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- English.
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- Schöner, Adolf
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- Bakowski, Mietek
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- Royal Institute of Technology
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