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Design and performance of a new reactor for vapor phase epitaxy of 3C, 6H, and 4H SiC
- Nordell, N (author)
- Schoner, A (author)
- Andersson, S G (author)
- 2019-12-06
- 1996
- English.
- In: Journal of the Electrochemical Society. - : The Electrochemical Society. - 0013-4651 .- 1945-7111. ; 143:9, s. 2910-2919
- Journal article (peer-reviewed)
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