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Large scale integra...
Large scale integration of graphene transistors for potential applications in the back end of the line
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- Smith, Anderson D. (author)
- KTH,Integrerade komponenter och kretsar
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- Vaziri, Sam (author)
- KTH,Integrerade komponenter och kretsar
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- Rodriguez, Saul (author)
- KTH,Integrerade komponenter och kretsar
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- Östling, Mikael (author)
- KTH,Integrerade komponenter och kretsar
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- Lemme, Max C. (author)
- KTH,Integrerade komponenter och kretsar,University of Siegen, Germany
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(creator_code:org_t)
- Elsevier BV, 2015
- 2015
- English.
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In: Solid-State Electronics. - : Elsevier BV. - 0038-1101 .- 1879-2405. ; 108, s. 61-66
- Related links:
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Subject headings
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- A chip to wafer scale, CMOS compatible method of graphene device fabrication has been established, which can be integrated into the back end of the line (BEOL) of conventional semiconductor process flows. In this paper, we present experimental results of graphene field effect transistors (GFETs) which were fabricated using this wafer scalable method. The carrier mobilities in these transistors reach up to several hundred cm(2) V-1 s(-1). Further, these devices exhibit current saturation regions similar to graphene devices fabricated using mechanical exfoliation. The overall performance of the GFETs can not yet compete with record values reported for devices based on mechanically exfoliated material. Nevertheless, this large scale approach is an important step towards reliability and variability studies as well as optimization of device aspects such as electrical contacts and dielectric interfaces with statistically relevant numbers of devices. It is also an important milestone towards introduting graphene into wafer scale process lines.
Subject headings
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Keyword
- Graphene
- Transistor
- Process integration
- Wafer scale
Publication and Content Type
- ref (subject category)
- art (subject category)
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