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Multilayer ferromag...
Multilayer ferromagnetic composites enabling on-chip magnetic-core inductors beyond 1 GHZ
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- Liljeholm, Jessica (author)
- Silex Microsystems, Stockholm, Sweden
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- Ebefors, Thorbjörn (author)
- Silex Microsystems, Stockholm, Sweden
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- Rohrmann, Hartmut (author)
- Evatec Advanced Technologies AG, Balzers, Liechtenstein
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- Shah, Umer (author)
- KTH,Mikro- och nanosystemteknik,RF MEMS
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- Oberhammer, Joachim (author)
- KTH,Mikro- och nanosystemteknik,RF MEMS
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(creator_code:org_t)
- IEEE conference proceedings, 2015
- 2015
- English.
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In: Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on. - : IEEE conference proceedings. ; , s. 811-814
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http://ieeexplore.ie...
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https://kth.diva-por... (primary) (Raw object)
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Subject headings
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- This paper reports of fabricated unpatterned ferromagnetic NiFe/AlN multilayer composites and an established process flow for magnetic core material suitable for integration with Silex 3D RF TSV technology. The fabricated single-loop test inductors achieved an inductance enhancement of 4.8 and a quality factor enhancement of 4.5 at 400 MHz. Simulations show that magnetic material in connection with 3D TSV inductors result in an inductance enhancement up to a factor of 5 at GHz frequencies for the same inductor area or the same inductance can be achieved at 9 times smaller area and cost.
Subject headings
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Keyword
- MEMS foundry
- NiFe/AlN multilayer composite
- RF microstrip
- magnetic materials
- micromachined inductors
Publication and Content Type
- ref (subject category)
- kon (subject category)
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