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- Dutta, Joydeep (author)
Multilayered silicon/silicon nitride thin films deposited by plasma-CVD : Effects of crystallization
- Article/chapterEnglish1995
Publisher, publication year, extent ...
- Elsevier BV,1995
- printrdacarrier
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- LIBRIS-ID:oai:DiVA.org:kth-175302
- https://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-175302URI
- https://doi.org/10.1016/0965-9773(95)00191-3DOI
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- Language:English
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- SwePubSwePub
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- NR 20160411
Subject headings and genre
- TEKNIK OCH TEKNOLOGIER Nanoteknik hsv//swe
- ENGINEERING AND TECHNOLOGY Nano-technology hsv//eng
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- Reaney, I. M. (author)
- Roca i Cabarrocas, P. (author)
- Hofmann, H. (author)
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- In:Nanostructured Materials: Elsevier BV6:5-8, s. 843-8460965-9773
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