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Electronic structur...
Electronic structure of Cu3N films studied by soft x-ray spectroscopy
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- Modin, A. (author)
- Uppsala universitet,Molekyl- och kondenserade materiens fysik
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- Kvashnina, K. O. (author)
- Uppsala universitet,Fysik II
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- Butorin, Sergei. M. (author)
- Uppsala universitet,Molekyl- och kondenserade materiens fysik
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- Werme, Lars (author)
- Uppsala universitet,Fysik II
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- Nordgren, Joseph (author)
- Uppsala universitet,Fysik II
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- Arapan, S. (author)
- Uppsala universitet,Fysiska institutionen
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- Ahuja, Rajeev (author)
- Uppsala universitet,KTH,Materialvetenskap,Fysiska institutionen
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Fallberg, A. (author)
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- Ottosson, Mikael (author)
- Uppsala universitet,Institutionen för materialkemi
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(creator_code:org_t)
- 2008-05-06
- 2008
- English.
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In: Journal of Physics. - : IOP Publishing. - 0953-8984 .- 1361-648X. ; 20:23
- Related links:
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https://urn.kb.se/re...
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https://doi.org/10.1...
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https://urn.kb.se/re...
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Abstract
Subject headings
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- Soft x- ray emission spectroscopy was used to characterize the electronic structure of seven copper nitride films, one synthesized with atomic layer deposition ( ALD) and six grown with chemical vapor deposition ( CVD) at different preparation temperatures. Interpretation of the x- ray emission spectra was supported by calculations of the electronic structure for bulk pure Cu3N and Cu3N with: an excess of Cu atoms, oxygen or carbon impurities, and N vacancies. The calculations are shown to describe the experimental spectra quite well. Analysis of the x- ray spectra suggests that films grown in copper rich environments and above a cut- off temperature of approximately 360 degrees C have a growing fraction of copper enriched areas, while films prepared below this temperature do not have these areas with excess copper.
Subject headings
- NATURVETENSKAP -- Fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences (hsv//eng)
Keyword
- nitride thin-films
- total-energy calculations
- augmented-wave method
- copper nitride
- deposition
- growth
- Physics
Publication and Content Type
- ref (subject category)
- art (subject category)
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