Stability of droplet-target laser-plasma soft x-ray sources

• The spatial stability of microscopic target droplets used for laser-plasma soft x-ray generation in vacuum is investigated. A long-term drift in drop position is characterized with an ultrafast laser-diode imaging system. The drift is experimentally and theoretically shown to be due to a temperature-induced increase in target-liquid viscosity as a result of evaporation. Finally, the drift is compensated for and stable, long-term unattended operation of the source is demonstrated with an automatic phase-delay drop-to-laser synchronizing system. This is important for future compact lithography and microscopy systems.

Keyword

ink-jet

debris

generation

emission

Publication and Content Type

ref (subject category)

art (subject category)