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The Ion Energy Distribution in a Planar Inductive Oxygen Discharge

Gudmundsson, Jon Tomas, 1965- (author)
University of Iceland, Iceland
 (creator_code:org_t)
1999
1999
English.
In: Journal of Physics D. - 0022-3727 .- 1361-6463. ; 32:7, s. 798-803
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