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Rapid manufacturing...
Rapid manufacturing of OSTE polymer RF-MEMS components
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- Rahiminejad, Sofia, 1987 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Hansson, Jonas, 1983- (author)
- KTH,Mikro- och nanosystemteknik,Proteomik och nanobioteknologi,Science for Life Laboratory, SciLifeLab,Kungliga Tekniska Högskolan (KTH),Royal Institute of Technology (KTH),Mercene Labs AB
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- Köhler, Elof, 1980 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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- van der Wijngaart, Wouter (author)
- KTH,Mikro- och nanosystemteknik,Kungliga Tekniska Högskolan (KTH),Royal Institute of Technology (KTH)
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- Haraldsson, Klas Tommy (author)
- KTH,Fiber- och polymerteknologi,Mikro- och nanosystemteknik,Kungliga Tekniska Högskolan (KTH),Royal Institute of Technology (KTH),Mercene Labs AB
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- Haasl, Sjoerd, 1976- (author)
- KTH,Centrum för teknik i medicin och hälsa, CTMH,Mikro- och nanosystemteknik,Chalmers tekniska högskola,Chalmers University of Technology
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- Enoksson, Peter, 1957 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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(creator_code:org_t)
- ISBN 9781509050789
- IEEE, 2017
- 2017
- English.
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In: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). - : IEEE. - 1084-6999. - 9781509050789 ; , s. 901-904
- Related links:
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http://www.mems17.or...
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Subject headings
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- This paper reports the first RF-MEMS component in OSTE polymer. Three OSTE-based ridge gap resonators were fabricated by direct, high aspect ratio, photostructuring. The OSTE polymer's good adhesion to gold makes it suitable for RF-MEMS applications. The OSTE ridge gap resonators differ in how they were coated with gold. The OSTE-based devices are compared to each other as well as to Si-based, SU8-based, and CNT-based devices of equal design. The OSTE-based process was performed outside the cleanroom, and with a fast fabrication process (∼1 h). The OSTE-based device performance is on par with that of the other alternatives in terms of frequency, attenuation, and Q-factor.
Subject headings
- TEKNIK OCH TEKNOLOGIER -- Materialteknik -- Textil-, gummi- och polymermaterial (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Materials Engineering -- Textile, Rubber and Polymeric Materials (hsv//eng)
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Keyword
- Aspect ratio
- Gold
- Gold coatings
- Mechanics
- Polymers
- Q factor measurement
- Resonators
- Device performance
- Fabrication process
- High aspect ratio
- Q-factors
- Rapid manufacturing
- RF-MEMS
- Si-based
- MEMS
Publication and Content Type
- ref (subject category)
- kon (subject category)
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- By the author/editor
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Rahiminejad, Sof ...
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Hansson, Jonas, ...
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Köhler, Elof, 19 ...
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van der Wijngaar ...
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Haraldsson, Klas ...
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Haasl, Sjoerd, 1 ...
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Enoksson, Peter, ...
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- About the subject
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- ENGINEERING AND TECHNOLOGY
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ENGINEERING AND ...
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and Materials Engine ...
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and Textile Rubber a ...
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- ENGINEERING AND TECHNOLOGY
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ENGINEERING AND ...
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and Electrical Engin ...
- Articles in the publication
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Proceedings of t ...
- By the university
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Royal Institute of Technology
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Chalmers University of Technology