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High-performance epitaxial Na0.5K0.5NbO3 thin films by magnetron sputtering

Blomqvist, Mats (author)
KTH,Mikroelektronik och informationsteknik, IMIT,Department of Condensed Matter Physics, Royal Institute of Technology, Stockholm, Sweden
Koh, Jung-Hyuk (author)
KTH,Mikroelektronik och informationsteknik, IMIT,Department of Condensed Matter Physics, Royal Institute of Technology, Stockholm, Sweden
Khartsev, Sergiy (author)
KTH,Mikroelektronik och informationsteknik, IMIT,Department of Condensed Matter Physics, Royal Institute of Technology, Stockholm, Sweden
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Grishin, Alexander M. (author)
KTH,Mikroelektronik och informationsteknik, IMIT
Andréasson, Johanna (author)
Luleå tekniska universitet
Grishin, Alex (author)
Department of Condensed Matter Physics, Royal Institute of Technology, Stockholm, Sweden
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 (creator_code:org_t)
AIP Publishing, 2002
2002
English.
In: Applied Physics Letters. - : AIP Publishing. - 0003-6951 .- 1077-3118. ; 81:2, s. 337-339
  • Journal article (peer-reviewed)
Abstract Subject headings
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  • Epitaxial Na0.5K0.5NbO3 (NKN) thin films have been grown on LaAlO3 substrates by rf magnetron sputtering of a stoichiometric, high-density, ceramic target. X-ray diffraction analysis showed c-axis oriented cube-on-cube growth. Micrometer size interdigital capacitor (IDC) structures were defined on the surface of the NKN film using photolithography. The electrical characterization at 1 MHz showed dissipation factor tan delta of 0.010, tunability 16.5% at 200 kV/cm and dielectric permittivity epsilon(r)=470. The frequency dispersion of epsilon(r) between 1 kHz and 1 MHz was 8.5% and the IDCs showed very good insulating properties with leakage current density on the order of 30 nA/cm(2) at 400 kV/cm. The polarization loop exhibits weak ferroelectric hysteresis with maximum polarization 23.5 muC/cm(2) at 600 kV/cm. These results are promising for tunable microwave devices based on rf sputtered NKN thin films.

Subject headings

TEKNIK OCH TEKNOLOGIER  -- Materialteknik -- Annan materialteknik (hsv//swe)
ENGINEERING AND TECHNOLOGY  -- Materials Engineering -- Other Materials Engineering (hsv//eng)

Keyword

interdigital capacitors
Functional materials
Funktionella material
Engineering Materials

Publication and Content Type

ref (subject category)
art (subject category)

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