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Influence of prepar...
Influence of preparation conditions on structure and photosensing properties of GeSi/TiO2 multilayers
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Slav, A. (author)
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Palade, C. (author)
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Stavarache, I. (author)
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Teodorescu, V. S. (author)
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Ciurea, M. L. (author)
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Muller, R. (author)
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Dinescu, A. (author)
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Sultan, M. T. (author)
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Manolescu, A. (author)
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- Gudmundsson, Jon Tomas, 1965- (author)
- KTH,Rymd- och plasmafysik,University of Iceland, Iceland
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Svavarsson, H. G. (author)
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(creator_code:org_t)
- Institute of Electrical and Electronics Engineers (IEEE), 2017
- 2017
- English.
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In: 2017 International Semiconductor Conference (CAS). - : Institute of Electrical and Electronics Engineers (IEEE). - 9781509039852 ; , s. 63-66
- Related links:
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Subject headings
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- The photosensing properties related to the structure of GeSi/TiO2 multilayers prepared under different conditions are studied. TiO2 cap/(GeSi/TiO2)2 multilayers (ML) were deposited by magnetron sputtering (MS) and annealed by rapid thermal annealing. Trilayers of TiO2 cap/GeSi/TiO2 (TL) were also deposited using reactive high power impulse MS (HiPIMS) for TiO2 layers and dc MS for the GeSi layer. For TL samples a two-step annealing was employed, one before and the second after depositing TiO2 cap. Structure and morphology characterization (X-ray diffraction, scanning and transmission electron microscopy) was carried out and photocurrent measurements (voltage dependences, spectral curves) were performed. The annealed ML samples are formed of GeSi NCs with 5-10 nm sizes, while in the annealed TL samples, the GeSi NCs are larger (20-30 nm). These morphologies determine the multilayers photosensing properties in VIS-NIR of ML structures and in UV in TL ones, respectively.
Subject headings
- NATURVETENSKAP -- Fysik -- Annan fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Other Physics Topics (hsv//eng)
Keyword
- GeSi nanocrystals
- photosensing
- TiO2
Publication and Content Type
- ref (subject category)
- kon (subject category)
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- By the author/editor
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Slav, A.
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Palade, C.
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Stavarache, I.
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Teodorescu, V. S ...
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Ciurea, M. L.
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Muller, R.
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show more...
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Dinescu, A.
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Sultan, M. T.
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Manolescu, A.
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Gudmundsson, Jon ...
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Svavarsson, H. G ...
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show less...
- About the subject
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- NATURAL SCIENCES
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NATURAL SCIENCES
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and Physical Science ...
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and Other Physics To ...
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2017 Internation ...
- By the university
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Royal Institute of Technology