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Schottky-barrier behavior of metals on n- and p-type 6H-SiC

Aboelfotoh, M. O. (author)
Fröjdh, Christer, 1952- (author)
Mittuniversitetet,Institutionen för informationsteknologi och medier (-2013)
Petersson, C. Sture (author)
Mittuniversitetet,KTH,Mikroelektronik och informationsteknik, IMIT,Institutionen för informationsteknologi och medier (-2013)
 (creator_code:org_t)
2003
2003
English.
In: Physical Review B. Condensed Matter and Materials Physics. - 1098-0121 .- 1550-235X. ; 67:7, s. 075312-
  • Journal article (peer-reviewed)
Abstract Subject headings
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  • The Schottky-barrier height of a number of metals (Ti, Ni, Cu, and Au) on n- and p-type Si-terminated 6H-SiC has been measured in the temperature range 150-500 K. It is found that the barrier height to n-type 6H-SiC does not exhibit a temperature dependence, while for p-type 6H-SiC the change in the barrier height with temperature follows very closely the change in the indirect energy gap in 6H-SiC. These results are inconsistent with models of Schottky-barrier formation based on the concept of a charge neutrality level. Furthermore, the present results cannot be reconciled with a defect pinning mechanism, contrary to the conclusions of earlier studies on III-V compound semiconductors. We suggest that chemical bonding at the metal-semiconductor interface plays an important role in determining the Schottky-barrier height.

Subject headings

TEKNIK OCH TEKNOLOGIER  -- Elektroteknik och elektronik (hsv//swe)
ENGINEERING AND TECHNOLOGY  -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)

Keyword

gap states
electronic-structure
conduction-band
chemical trends
dangling bonds
interface
defects
contacts
silicon
dependence
Electrical engineering, electronics and photonics

Publication and Content Type

ref (subject category)
art (subject category)

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