Capillary nozzles for liquid-jet laser-plasma x-ray sources

• We describe a method to fabricate tapered glass nozzles suitable for liquid-jet-target generation in laser-plasma soft x-ray and extreme ultraviolet sources. In the method, a tapered nozzle is formed as an integral part of a flexible capillary glass tubing. The method makes use of inert materials, extending the possible choice of target liquids compared to current nozzles. It also provides flexibility as regards nozzle diameter and pressure, thereby allowing optimization of the target size and extending the range of applicability for the liquid-jet-target laser plasmas.

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target

generation

euv

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