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- Hansson, BjörnKTH,Fysik (author)
Stabilization of liquified-inert-gas jets for laser-plasma generation
- Article/chapterEnglish2004
Publisher, publication year, extent ...
- AIP Publishing,2004
- printrdacarrier
Numbers
- LIBRIS-ID:oai:DiVA.org:kth-23295
- https://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-23295URI
- https://doi.org/10.1063/1.1687037DOI
Supplementary language notes
- Language:English
- Summary in:English
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- QC 20100525
- We investigate the hydrodynamic properties of liquified-inert-gas jets in a vacuum with a special emphasis on their stability. Such jets have applications as targets for laser-plasma generation of soft-x-ray and extreme-ultraviolet (EUV) radiation. An important example is the liquid-xenon-jet laser-plasma source, one of the source candidates for EUV lithography. A simple hydrodynamic model in not sufficient to explain experimental observations of jet stability. Evaporation-induced cooling explains observed in-flight freezing of the jet and may be a key factor influencing jet stability. It is shown how the jet stability, and, thus, the stability of the laser-plasma x-ray and EUV emission, are improved by applying localized heating to the tip of the jet-generating nozzle.
Subject headings and genre
- NATURVETENSKAP Fysik Atom- och molekylfysik och optik hsv//swe
- NATURAL SCIENCES Physical Sciences Atom and Molecular Physics and Optics hsv//eng
- x-ray source
- liquid-xenon
- droplet-target
- euv lithography
- debris
- evaporation
- stability
- hydrogen
- surface
Added entries (persons, corporate bodies, meetings, titles ...)
- Berglund, MagnusKTH,Fysik(Swepub:kth)- (author)
- Hemberg, OscarKTH,Fysik(Swepub:kth)u16lyvg0 (author)
- Hertz, Hans M.KTH,Fysik(Swepub:kth)u10uiefj (author)
- KTHFysik (creator_code:org_t)
Related titles
- In:Journal of Applied Physics: AIP Publishing95:8, s. 4432-44370021-89791089-7550
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- Hansson, Björn
- Berglund, Magnus
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- Hertz, Hans M.
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- NATURAL SCIENCES
- NATURAL SCIENCES
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