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Controlling the car...
Controlling the carbon vacancy in 4H-SiC by thermal processing
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- Ayedh, H. M. (author)
- University of Oslo, Department of Physics, Center for Materials Science and Nanotechnology, N-0316 Oslo, NORWAY
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- Bathen, M. E. (author)
- University of Oslo, Department of Physics, Center for Materials Science and Nanotechnology, N-0316 Oslo, NORWAY
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- Galeckas, A. (author)
- University of Oslo, Department of Physics, Center for Materials Science and Nanotechnology, N-0316 Oslo, NORWAY
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- ul-Hassan, Jawad, 1974- (author)
- Linköpings universitet,Halvledarmaterial,Tekniska fakulteten
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- Bergman, Peder, Professor, 1961- (author)
- Linköpings universitet,Halvledarmaterial,Tekniska fakulteten
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- Nipoti, R. (author)
- CNR-IMM of Bologna, I-40129 Bologna, ITALY
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- Hallén, Anders (author)
- KTH,Integrerade komponenter och kretsar,Royal Institute of Technology, KTH, School of Information and Communication Technology, SE-164 40 Kista-Stockholm, SWEDEN
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- Svensson, B. G. (author)
- University of Oslo, Department of Physics, Center for Materials Science and Nanotechnology, N-0316 Oslo, NORWAY
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(creator_code:org_t)
- 2018-09-21
- 2018
- English.
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Series: ECS Transactions, 1938-5862 1938-6737
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In: ECS Transactions. - : Electrochemical Society Inc.. - 1938-6737 .- 1938-5862. ; , s. 91-97
- Related links:
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https://urn.kb.se/re...
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https://doi.org/10.1...
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https://urn.kb.se/re...
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Abstract
Subject headings
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- The carbon vacancy (Vc) is perhaps the most prominent point defect in silicon carbide (SiC) and it is an efficient charge carrier lifetime killer in high-purity epitaxial layers of 4H-SÌC. The Vc concentration needs to be controlled and minimized for optimum materials and device performance, and an approach based on post-growth thermal processing under C-rich ambient conditions is presented. It utilizes thermodynamic equilibration and after heat treatment at 1500 °C for 1 h, the Vc concentration is shown to be reduced by a factor-25 relative to that in as-grown state-of-the-art epi-layers. Concurrently, a considerable enhancement of the carrier lifetime occurs throughout the whole of >40 urn thick epi-layers.
Subject headings
- NATURVETENSKAP -- Kemi -- Materialkemi (hsv//swe)
- NATURAL SCIENCES -- Chemical Sciences -- Materials Chemistry (hsv//eng)
Keyword
- Carbon
- Carrier lifetime
- Gallium nitride
- Heat treatment
- III-V semiconductors
- After-heat treatment
- Ambient conditions
- As-grown
- Carbon vacancy
- Device performance
- High purity
- Silicon carbides (SiC)
- State of the art
- Silicon carbide
Publication and Content Type
- ref (subject category)
- kon (subject category)
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