MEMS for Photonic Integrated Circuits

Takabayashi, A. Y. (author)

Sattari, H. (author)

Quack, Niels (author)

(creator_code:org_t)

IEEE Press, 2020
2020
English.
In: IEEE Journal of Selected Topics in Quantum Electronics. - : IEEE Press. - 1077-260X .- 1558-4542. ; 26:2, s. 1-16

Related links:: https://doi.org/10.1...; show more...; https://kth.diva-por... (primary) (Raw object); https://urn.kb.se/re...; https://doi.org/10.1...; show less...

Abstract Subject headings

The field of microelectromechanical systems (MEMS) for photonic integrated circuits (PICs) is reviewed. This field leverages mechanics at the nanometer to micrometer scale to improve existing components and introduce novel functionalities in PICs. This review covers the MEMS actuation principles and the mechanical tuning mechanisms for integrated photonics. The state of the art of MEMS tunable components in PICs is quantitatively reviewed and critically assessed with respect to suitability for large-scale integration in existing PIC technology platforms. MEMS provide a powerful approach to overcome current limitations in PIC technologies and to enable a new design dimension with a wide range of applications.

TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)
ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)

By the author/editor: Errando-Herranz, ...; Takabayashi, A. ...; Edinger, Pierre; Sattari, H.; Gylfason, Kristi ...; Quack, Niels

About the subject

ENGINEERING AND TECHNOLOGY: ENGINEERING AND ...; and Electrical Engin ...; and Other Electrical ...

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