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MEMS for Photonic I...
MEMS for Photonic Integrated Circuits
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- Errando-Herranz, Carlos, 1989- (author)
- KTH,Mikro- och nanosystemteknik
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Takabayashi, A. Y. (author)
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- Edinger, Pierre (author)
- KTH,Mikro- och nanosystemteknik
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Sattari, H. (author)
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- Gylfason, Kristinn B., 1978- (author)
- KTH,Mikro- och nanosystemteknik
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Quack, Niels (author)
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(creator_code:org_t)
- IEEE Press, 2020
- 2020
- English.
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In: IEEE Journal of Selected Topics in Quantum Electronics. - : IEEE Press. - 1077-260X .- 1558-4542. ; 26:2, s. 1-16
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https://doi.org/10.1...
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https://kth.diva-por... (primary) (Raw object)
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https://doi.org/10.1...
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Abstract
Subject headings
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- The field of microelectromechanical systems (MEMS) for photonic integrated circuits (PICs) is reviewed. This field leverages mechanics at the nanometer to micrometer scale to improve existing components and introduce novel functionalities in PICs. This review covers the MEMS actuation principles and the mechanical tuning mechanisms for integrated photonics. The state of the art of MEMS tunable components in PICs is quantitatively reviewed and critically assessed with respect to suitability for large-scale integration in existing PIC technology platforms. MEMS provide a powerful approach to overcome current limitations in PIC technologies and to enable a new design dimension with a wide range of applications.
Subject headings
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Keyword
- Tuning
- Micromechanical devices
- Optical waveguides
- Integrated optics
- Optical refraction
- Optical variables control
- Nonlinear optics
- Microelectromechanical systems
- photonic integrated circuits
- silicon photonics
- photonics
- nanophotonics
- integrated optics
- nanoelectromechanical systems
- MEMS
- PIC
Publication and Content Type
- ref (subject category)
- art (subject category)
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