Macroscopic defects in GaN/AlN multiple quantum well structures grown by MBE on GaN templates

Andersson, Thorvald,1946Chalmers tekniska högskola,Chalmers University of Technology (author)

QC 20110323 Symposium on Wide Band Gap Semiconductor Nanostructures for Optoelectronic Applications held at the 2008 E-MRS Conference, Strasbourg, FRANCE, MAY, 2008
We have used MBE to grow in AlN/GaN superlattices, with different number of periods, on 2.5-mu m-thick MOVPE-GaN templates to study the development of defects such as surface deformation due to strain. After growth the samples were studied by atomic force microscopy (AFM), transmission electron microscopy (TEM), XRD and Fourier transform infrared spectroscopy (FT-IR). The strain increased with the number of quantum wells (QWs) and eventually caused defects such as microcracks visible by optical microscopy at four or more QW periods. High-resolution TEM images showed shallow recessions on the surface (surface deformation) indicating formation of microcracks in the MQW region. The measured intersubband (IS) absorption linewidth from a four period structure was 97 meV, which is comparable with the spectrum from a 10 period structure at an absorption energy of similar to 700 meV. This indicates that the interface quality of the MQW is not substantially affected by the presence of cracks.

Liu, Xinju,1979Chalmers tekniska högskola,Chalmers University of Technology(Swepub:cth)liuxinyu (author)
Aggerstam, ThomasKTH,Mikroelektronik och tillämpad fysik, MAP,Kungliga Tekniska Högskolan (KTH),Royal Institute of Technology (KTH)(Swepub:kth)u1p9u0ta (author)
Holmström, PetterKTH,Mikroelektronik och tillämpad fysik, MAP,Kungliga Tekniska Högskolan (KTH),Royal Institute of Technology (KTH)(Swepub:kth)u1rcuhvs (author)
Lourdudoss, SebastianKTH,Mikroelektronik och tillämpad fysik, MAP,Kungliga Tekniska Högskolan (KTH),Royal Institute of Technology (KTH)(Swepub:kth)u16044fg (author)
Thylen, LarsKTH,Mikroelektronik och tillämpad fysik, MAP,Kungliga Tekniska Högskolan (KTH),Royal Institute of Technology (KTH)(Swepub:kth)u1odcwum (author)
Chen, Y. L.National Sun Yat-Sen University (author)
Hsieh, C. H.National Sun Yat-Sen University (author)
Lo, I.National Sun Yat-Sen University (author)
Chalmers tekniska högskolaMikroelektronik och tillämpad fysik, MAP (creator_code:org_t)

By the author/editor: Andersson, Thorv ...; Liu, Xinju, 1979; Aggerstam, Thoma ...; Holmström, Pette ...; Lourdudoss, Seba ...; Thylen, Lars; show more...; Chen, Y. L.; Hsieh, C. H.; Lo, I.; show less...

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By the university: Royal Institute of Technology; Chalmers University of Technology

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