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A Resonant Graphene NEMS Vibrometer

Moreno-Garcia, D. (author)
Ecole Polytechnique Federale de Lausanne (EPFL),Swiss Federal Institute of Technology in Lausanne (EPFL)
Fan, Xuge (author)
KTH,Mikro- och nanosystemteknik,Adv. Research Institute of Multidisciplinary Sciences, Beijing Institute of Technology, Beijing, 100081 China,Kungliga Tekniska Högskolan (KTH),Royal Institute of Technology (KTH),Beijing Institute of Technology
Smith, Anderson David, 1985 (author)
Chalmers tekniska högskola,Chalmers University of Technology
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Lemme, M. C. (author)
Rheinisch-Westfaelische Technische Hochschule Aachen,RWTH Aachen University
Messina, V. (author)
Ecole Polytechnique Federale de Lausanne (EPFL),Swiss Federal Institute of Technology in Lausanne (EPFL)
Martin-Olmos, C. (author)
Niklaus, Frank, 1971- (author)
KTH,Mikro- och nanosystemteknik,Kungliga Tekniska Högskolan (KTH),Royal Institute of Technology (KTH)
Villanueva, L. G. (author)
Ecole Polytechnique Federale de Lausanne (EPFL),Swiss Federal Institute of Technology in Lausanne (EPFL)
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 (creator_code:org_t)
2022-05-30
2022
English.
In: Small. - : Wiley. - 1613-6810 .- 1613-6829. ; 18:28
  • Journal article (peer-reviewed)
Abstract Subject headings
Close  
  • Measuring vibrations is essential to ensuring building structural safety and machine stability. Predictive maintenance is a central internet of things (IoT) application within the new industrial revolution, where sustainability and performance increase over time are going to be paramount. To reduce the footprint and cost of vibration sensors while improving their performance, new sensor concepts are needed. Here, double-layer graphene membranes are utilized with a suspended silicon proof demonstrating their operation as resonant vibration sensors that show outstanding performance for a given footprint and proof mass. The unveiled sensing effect is based on resonant transduction and has important implications for experimental studies involving thin nano and micro mechanical resonators that are excited by an external shaker. 

Subject headings

TEKNIK OCH TEKNOLOGIER  -- Maskinteknik (hsv//swe)
ENGINEERING AND TECHNOLOGY  -- Mechanical Engineering (hsv//eng)
TEKNIK OCH TEKNOLOGIER  -- Annan teknik -- Övrig annan teknik (hsv//swe)
ENGINEERING AND TECHNOLOGY  -- Other Engineering and Technologies -- Other Engineering and Technologies not elsewhere specified (hsv//eng)
TEKNIK OCH TEKNOLOGIER  -- Kemiteknik -- Annan kemiteknik (hsv//swe)
ENGINEERING AND TECHNOLOGY  -- Chemical Engineering -- Other Chemical Engineering (hsv//eng)
TEKNIK OCH TEKNOLOGIER  -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)
ENGINEERING AND TECHNOLOGY  -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)

Keyword

graphene
laser doppler vibrometry
nano-electromechanical (NEMS)
resonators
vibration
Laser Doppler velocimeters
NEMS
Vibration measurement
Building structural
Nano-electromechanical
Performance
Safety stability
Structural safety
Vibration sensors
Vibrometers
Internet of things
graphite
silicon
chemistry
equipment design
microelectromechanical system
Micro-Electrical-Mechanical Systems

Publication and Content Type

ref (subject category)
art (subject category)

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