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High power impulse ...
High power impulse magnetron sputtering of tungsten : a comparison of experimental and modelling results
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- Babu, Swetha Suresh (author)
- Univ Iceland, Sci Inst, Dunhaga 3, IS-107 Reykjavik, Iceland.
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- Rudolph, Martin (author)
- Leibniz Inst Surface Engn IOM, Permoserstr 15, D-04318 Leipzig, Germany.
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- Ryan, Peter John (author)
- Univ Liverpool, Dept Elect Engn & Elect, Brownlow Hill, Liverpool L69 3GJ, England.
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- Fischer, Joel (author)
- Linköpings universitet,Plasma och ytbeläggningsfysik,Tekniska fakulteten
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- Lundin, Daniel (author)
- Linköpings universitet,Plasma och ytbeläggningsfysik,Tekniska fakulteten
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- Bradley, James W. (author)
- Univ Liverpool, Dept Elect Engn & Elect, Brownlow Hill, Liverpool L69 3GJ, England.
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- Gudmundsson, Jon Tomas, 1965- (author)
- KTH,Rymd- och plasmafysik,Univ Iceland, Sci Inst, Dunhaga 3, IS-107 Reykjavik, Iceland.,Univ Iceland, Iceland; KTH Royal Inst Technol, Sweden
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Univ Iceland, Sci Inst, Dunhaga 3, IS-107 Reykjavik, Iceland Leibniz Inst Surface Engn IOM, Permoserstr 15, D-04318 Leipzig, Germany. (creator_code:org_t)
- 2023-03-20
- 2023
- English.
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In: Plasma sources science & technology. - : IOP Publishing. - 0963-0252 .- 1361-6595. ; 32:3, s. 034003-
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Abstract
Subject headings
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- Here, we compare the ionization region model (IRM) against experimental measurements of particle densities and electron temperature in a high power impulse magnetron sputtering discharge with a tungsten target. The semi-empirical model provides volume-averaged temporal variations of the various species densities as well as the electron energy for a particular cathode target material, when given the measured discharge current and voltage waveforms. The model results are compared to the temporal evolution of the electron density and the electron temperature determined by Thomson scattering measurements and the temporal evolution of the relative neutral and ion densities determined by optical emission spectrometry. While the model underestimates the electron density and overestimates the electron temperature, the temporal trends of the species densities and the electron temperature are well captured by the IRM.
Subject headings
- NATURVETENSKAP -- Fysik -- Fusion, plasma och rymdfysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Fusion, Plasma and Space Physics (hsv//eng)
Keyword
- high power impulse magnetron sputtering
- tungsten
- magnetron sputtering
- HiPIMS
- plasma chemistry
Publication and Content Type
- ref (subject category)
- art (subject category)
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