Angular distribution of titanium ions and neutrals in high-power impulse magnetron sputtering discharges

Renner, Max (author): Linköpings universitet,Plasma och ytbeläggningsfysik,Tekniska fakulteten,Rhein Westfal TH Aachen, Germany

Fischer, Joel (author): Linköpings universitet,Plasma och ytbeläggningsfysik,Medicinska fakulteten,Evatec AG, Switzerland

Hajihoseini, H. (author): Univ Twente, MESA Inst Nanotechnol, Ind Focus Grp XUV Opt, NL-7522 Enschede, Netherlands.

Gudmundsson, Jon Tomas, 1965- (author): KTH,Rymd- och plasmafysik,Univ Iceland, Sci Inst, IS-107 Reykjavik, Iceland.,KTH Royal Inst Technol, Sweden; Univ Iceland, Iceland

Rudolph, M. (author): Leibniz Inst Surface Engn IOM, DE-04318 Leipzig, Germany.

Lundin, Daniel (author): Linköpings universitet,Plasma och ytbeläggningsfysik,Tekniska fakulteten

(creator_code:org_t)

American Vacuum Society, 2023
2023
English.
In: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : American Vacuum Society. - 0734-2101 .- 1520-8559. ; 41:3

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Abstract Subject headings

The angular dependence of the deposition rates due to ions and neutrals in high-power impulse magnetron sputtering (HiPIMS) discharges with a titanium target were determined experimentally using a magnetically shielded and charge-selective quartz crystal microbalance (or ionmeter). These rates have been established as a function of the argon working gas pressure, the peak discharge current density, and the pulse length. For all explored cases, the total deposition rate exhibits a heart-shaped profile and the ionized flux fraction peaks on the discharge axis normal to the cathode target surface. This heart-shaped pattern is found to be amplified at increasing current densities and reduced at increased working gas pressures. Furthermore, it is confirmed that a low working gas pressure is beneficial for achieving high deposition rates and high ionized flux fractions in HiPIMS operation.

By the author/editor: Renner, Max; Fischer, Joel; Hajihoseini, H.; Gudmundsson, Jon ...; Rudolph, M.; Lundin, Daniel

About the subject

NATURAL SCIENCES: NATURAL SCIENCES; and Physical Science ...; and Fusion Plasma an ...

NATURAL SCIENCES: NATURAL SCIENCES; and Physical Science ...; and Condensed Matter ...

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