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Diblock copolymer pattern protection by silver cluster reinforcement

Bulut, Yusuf (author)
Deutsch Elektronen Synchrotron DESY, Notkestr 85, D-22607 Hamburg, Germany.;Tech Univ Munich, Sch Nat Sci, Dept Phys, Chair Funct Mat, James Franck Str 1, D-85748 Garching, Germany.
Sochor, Benedikt (author)
Deutsch Elektronen Synchrotron DESY, Notkestr 85, D-22607 Hamburg, Germany.
Harder, Constantin (author)
Deutsch Elektronen Synchrotron DESY, Notkestr 85, D-22607 Hamburg, Germany.;Tech Univ Munich, Sch Nat Sci, Dept Phys, Chair Funct Mat, James Franck Str 1, D-85748 Garching, Germany.
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Reck, Kristian (author)
Christian Albrechts Univ Kiel, Dept Mat Sci, Chair Multicomponent Mat, Fac Engn, Kaiserstr 2, D-24143 Kiel, Germany.
Drewes, Jonas (author)
Christian Albrechts Univ Kiel, Dept Mat Sci, Chair Multicomponent Mat, Fac Engn, Kaiserstr 2, D-24143 Kiel, Germany.
Xu, Zhuijun (author)
Tech Univ Munich, Sch Nat Sci, Dept Phys, Chair Funct Mat, James Franck Str 1, D-85748 Garching, Germany.
Jiang, Xiongzhuo (author)
Tech Univ Munich, Sch Nat Sci, Dept Phys, Chair Funct Mat, James Franck Str 1, D-85748 Garching, Germany.
Meinhardt, Alexander (author)
Ctr X Ray & Nano Sci CXNS, Deutsch Elektronen Synchtrotron DESY, Notkestr 85, D-22607 Hamburg, Germany.;Univ Hamburg, Dept Phys, Notkestr 9-11, D-22607 Hamburg, Germany.
Jeromin, Arno (author)
Ctr X Ray & Nano Sci CXNS, Deutsch Elektronen Synchtrotron DESY, Notkestr 85, D-22607 Hamburg, Germany.
Kohantorabi, Mona (author)
Deutsch Elektronen Synchrotron DESY, Notkestr 85, D-22607 Hamburg, Germany.;Ctr X Ray & Nano Sci CXNS, Deutsch Elektronen Synchtrotron DESY, Notkestr 85, D-22607 Hamburg, Germany.
Noei, Heshmat (author)
Deutsch Elektronen Synchrotron DESY, Notkestr 85, D-22607 Hamburg, Germany.;Ctr X Ray & Nano Sci CXNS, Deutsch Elektronen Synchtrotron DESY, Notkestr 85, D-22607 Hamburg, Germany.
Keller, Thomas F. (author)
Ctr X Ray & Nano Sci CXNS, Deutsch Elektronen Synchtrotron DESY, Notkestr 85, D-22607 Hamburg, Germany.;Univ Hamburg, Dept Phys, Notkestr 9-11, D-22607 Hamburg, Germany.
Strunskus, Thomas (author)
Christian Albrechts Univ Kiel, Dept Mat Sci, Chair Multicomponent Mat, Fac Engn, Kaiserstr 2, D-24143 Kiel, Germany.
Faupel, Franz (author)
Christian Albrechts Univ Kiel, Dept Mat Sci, Chair Multicomponent Mat, Fac Engn, Kaiserstr 2, D-24143 Kiel, Germany.
Mueller-Buschbaum, Peter (author)
Tech Univ Munich, Sch Nat Sci, Dept Phys, Chair Funct Mat, James Franck Str 1, D-85748 Garching, Germany.;Tech Univ Munich, Heinz Maier Leibnitz Zentrum MLZ, Lichtenbergerstr 1, D-85748 Garching, Germany.
Roth, Stephan V. (author)
KTH,Ytbehandlingsteknik,Deutsch Elektronen Synchrotron DESY, Notkestr 85, D-22607 Hamburg, Germany
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Deutsch Elektronen Synchrotron DESY, Notkestr 85, D-22607 Hamburg, Germany;Tech Univ Munich, Sch Nat Sci, Dept Phys, Chair Funct Mat, James Franck Str 1, D-85748 Garching, Germany. Deutsch Elektronen Synchrotron DESY, Notkestr 85, D-22607 Hamburg, Germany. (creator_code:org_t)
Royal Society of Chemistry (RSC), 2023
2023
English.
In: Nanoscale. - : Royal Society of Chemistry (RSC). - 2040-3364 .- 2040-3372. ; 15:38, s. 15768-15774
Related links:
https://doi.org/10.1...
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  • Journal article (peer-reviewed)
Abstract Subject headings
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  • Pattern fabrication by self-assembly of diblock copolymers is of significant interest due to the simplicity in fabricating complex structures. In particular, polystyrene-block-poly-4-vinylpyridine (PS-b-P4VP) is a fascinating base material as it forms an ordered micellar structure on silicon surfaces. In this work, silver (Ag) is applied using direct current magnetron sputter deposition and high-power impulse magnetron sputter deposition on an ordered micellar PS-b-P4VP layer. The fabricated hybrid materials are structurally analyzed by field emission scanning electron microscopy, atomic force microscopy, and grazing incidence small angle X-ray scattering. When applying simple aqueous posttreatment, the pattern is stable and reinforced by Ag clusters, making micellar PS-b-P4VP ordered layers ideal candidates for lithography. The pristine micellar pattern of the diblock copolymer PS-b-P4VP degrades upon drying of a water droplet, which can be stabilized and inhibited upon deposition of silver clusters.

Subject headings

NATURVETENSKAP  -- Kemi -- Materialkemi (hsv//swe)
NATURAL SCIENCES  -- Chemical Sciences -- Materials Chemistry (hsv//eng)

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art (subject category)

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