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Heteroepitaxy and selective epitaxy for discrete and integrated devices

Lourdudoss, Sebastian (author)
KTH,Mikroelektronik och Informationsteknik, IMIT,Electrumlaboratoriet, ELAB
Olsson, Fredrik (author)
KTH,Electrumlaboratoriet, ELAB
Barrios, C. A. (author)
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Hakkarainen, Teppo (author)
KTH,Electrumlaboratoriet, ELAB
Berrier, Audrey (author)
KTH,Mikroelektronik och Informationsteknik, IMIT
Anand, Srinivasan (author)
KTH,Electrumlaboratoriet, ELAB,Mikroelektronik och Informationsteknik, IMIT
Aubert, Amandine (author)
KTH,Electrumlaboratoriet, ELAB
Berggren, Jesper (author)
KTH,Electrumlaboratoriet, ELAB,Mikroelektronik och Informationsteknik, IMIT
Broeke, R. G. (author)
Cao, J. (author)
Chubun, N. (author)
Seo, S. -W (author)
Baek, J. -H (author)
Aihara, K. (author)
Pharn, Anh-Vu (author)
Ben Yoo, S. J. (author)
Avella, M. (author)
Jimenez, J. (author)
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 (creator_code:org_t)
NEW YORK : IEEE, 2006
2006
English.
In: 2006 CONFERENCE ON OPTOELECTRONIC AND MICROELECTRONIC MATERIALS & DEVICES. - NEW YORK : IEEE. - 9781424405770 ; , s. 309-311
  • Conference paper (peer-reviewed)
Abstract Subject headings
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  • We present first results on heteroepitaxy of InP on silicon on insulator (SOI). We also demonstrate InP nanopillar fabrication by means of selective epitaxy. Selective epitaxy is also exploited to fabricate advanced photonic integrated devices for Optical Code Division Multiplex Access (OCDMA) networking applications.

Subject headings

NATURVETENSKAP  -- Fysik -- Atom- och molekylfysik och optik (hsv//swe)
NATURAL SCIENCES  -- Physical Sciences -- Atom and Molecular Physics and Optics (hsv//eng)

Keyword

heteroepitaxy
selective epitaxy
nanopillars
hydride vapour phase epitaxy
OCDAM devices

Publication and Content Type

ref (subject category)
kon (subject category)

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