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In-situ observation...
In-situ observation of non-hemispherical tip shape formation during laser-assisted atom probe tomography
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- Koelling, Sebastian (author)
- IMEC, Kapeldreef 75, B-3000 Leuven, Belgium
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- Innocenti, Nicolas, 1986- (author)
- IMEC, B-3000 Louvain; Univ Liege, Inst Montefiore
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- Schulze, Andreas (author)
- IMEC, Kapeldreef 75, B-3000 Leuven, Belgium
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- Gilbert, Matthieu (author)
- IMEC, Kapeldreef 75, B-3000 Leuven, Belgium
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- Kambham, AJay Kumar (author)
- IMEC, Kapeldreef 75, B-3000 Leuven, Belgium
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- Vandervorst, Wilfried (author)
- IMEC, Kapeldreef 75, B-3000 Leuven, Belgium
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(creator_code:org_t)
- American Institute of Physics (AIP), 2011
- 2011
- English.
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In: Journal of Applied Physics. - : American Institute of Physics (AIP). - 0021-8979 .- 1089-7550. ; 109:10, s. 104909-
- Related links:
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Subject headings
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- It is shown by SEM imaging of the tip and by observing the emission pattern of the evaporated atoms that laser assisted evaporation in an atom probe can lead to nonhemispherical tip shapes and time-dependent nonuniform emission. We have investigated this nonuniformity by observing the change in field of view when using laser wavelengths of 515 nm and 343 nm on silicon. The change is monitored in situ by 0.5 nm thick silicon oxide. We demonstrate that the field of view can easily be changed by more than 10 nm and that the apparent oxide layer thickness can deviate substantially from its correct value. The dependence of the tip shape deformations and the reconstruction artifacts on the laser wavelength are explained through simulations of the laser-tip interaction and nonhomogeneous heating effects.
Subject headings
- TEKNIK OCH TEKNOLOGIER -- Nanoteknik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Nano-technology (hsv//eng)
Keyword
- deformation
- elemental semiconductors
- evaporation
- laser beam applications
- scanning electron microscopy
- silicon
- silicon compounds
- tomography
- SRA - ICT
- SRA - Informations- och kommunikationsteknik
Publication and Content Type
- ref (subject category)
- art (subject category)
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