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New diamond nanofab...
New diamond nanofabrication process for hard x-ray zone plates
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- Uhlén, Fredrik (author)
- KTH,Biomedicinsk fysik och röntgenfysik
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- Lindqvist, Sandra (author)
- KTH,Biomedicinsk fysik och röntgenfysik
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- Nilsson, Daniel (author)
- KTH,Biomedicinsk fysik och röntgenfysik
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- Reinspach, Julia (author)
- KTH,Biomedicinsk fysik och röntgenfysik
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- Vogt, Ulrich (author)
- KTH,Biomedicinsk fysik och röntgenfysik
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- Hertz, Hans M. (author)
- KTH,Biomedicinsk fysik och röntgenfysik
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- Holmberg, Anders (author)
- KTH,Biomedicinsk fysik och röntgenfysik
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(creator_code:org_t)
- American Vacuum Society, 2011
- 2011
- English.
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In: Journal of Vacuum Science & Technology B. - : American Vacuum Society. - 1071-1023 .- 1520-8567. ; 29:6, s. 06FG03-1-06FG03-4
- Related links:
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Subject headings
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- The authors report on a new tungsten-hardmask-based diamond dry-etch process for fabricating diamond zone plate lenses with a high aspect ratio. The tungsten hardmask is structured by electron-beam lithography, together with Cl2/O2 and SF6/O2 reactive ion etching in a trilayer resist-chromium-tungsten stack. The underlying diamond is then etched in an O2 plasma. The authors demonstrate excellent-quality diamond gratings with half-pitch down to 80 nm and a height of 2.6 μm, as well as zone plates with a 75 μm diameter and 100 nm outermost zone width. The diffraction efficiency of the zone plates is measured to 14.5% at an 8 keV x-ray energy, and the imaging properties were investigated in a scanning microscope arrangement showing sub-100-nm resolution. The imaging and thermal properties of these lenses make them suitable for use with high-brightness x-ray free-electron laser sources.
Subject headings
- NATURVETENSKAP -- Fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences (hsv//eng)
Keyword
- zone plate; reactive ion etching; electron beam lithography; diamond; tungsten; nanofabrication; aspect ratio; x-ray free-electron laser; x-ray optics
Publication and Content Type
- ref (subject category)
- art (subject category)
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