New diamond nanofabrication process for hard x-ray zone plates

QC 20111114
The authors report on a new tungsten-hardmask-based diamond dry-etch process for fabricating diamond zone plate lenses with a high aspect ratio. The tungsten hardmask is structured by electron-beam lithography, together with Cl2/O2 and SF6/O2 reactive ion etching in a trilayer resist-chromium-tungsten stack. The underlying diamond is then etched in an O2 plasma. The authors demonstrate excellent-quality diamond gratings with half-pitch down to 80 nm and a height of 2.6 μm, as well as zone plates with a 75 μm diameter and 100 nm outermost zone width. The diffraction efficiency of the zone plates is measured to 14.5% at an 8 keV x-ray energy, and the imaging properties were investigated in a scanning microscope arrangement showing sub-100-nm resolution. The imaging and thermal properties of these lenses make them suitable for use with high-brightness x-ray free-electron laser sources.

NATURVETENSKAP Fysik hsv//swe
NATURAL SCIENCES Physical Sciences hsv//eng
zone plate; reactive ion etching; electron beam lithography; diamond; tungsten; nanofabrication; aspect ratio; x-ray free-electron laser; x-ray optics

Lindqvist, SandraKTH,Biomedicinsk fysik och röntgenfysik(Swepub:kth)u1eysrnh (author)
Nilsson, DanielKTH,Biomedicinsk fysik och röntgenfysik(Swepub:kth)u1hdm1w1 (author)
Reinspach, JuliaKTH,Biomedicinsk fysik och röntgenfysik(Swepub:kth)u1w7wvts (author)
Vogt, UlrichKTH,Biomedicinsk fysik och röntgenfysik(Swepub:kth)u1ikgztr (author)
Hertz, Hans M.KTH,Biomedicinsk fysik och röntgenfysik(Swepub:kth)u10uiefj (author)
Holmberg, AndersKTH,Biomedicinsk fysik och röntgenfysik(Swepub:kth)u1qav7db (author)
KTHBiomedicinsk fysik och röntgenfysik (creator_code:org_t)

In:Journal of Vacuum Science & Technology B: American Vacuum Society29:6, s. 06FG03-1-06FG03-41071-10231520-8567
In:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena: American Vacuum Society29:6, s. 06FG03-1-06FG03-42166-27462166-2754

By the author/editor: Uhlén, Fredrik; Lindqvist, Sandr ...; Nilsson, Daniel; Reinspach, Julia; Vogt, Ulrich; Hertz, Hans M.; show more...; Holmberg, Anders; show less...

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