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- Carlborg, Carl Fredrik,1981-KTH,Mikrosystemteknik (author)
LOW TEMPERATURE “CLICK” WAFER BONDING OF OFF-STOICHIOMETRY THIOL-ENE (OSTE) POLYMERS TO SILICON
- Article/chapterEnglish2011
Publisher, publication year, extent ...
- 2011
- electronicrdacarrier
Numbers
- LIBRIS-ID:oai:DiVA.org:kth-49436
- https://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-49436URI
Supplementary language notes
- Language:English
- Summary in:English
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Notes
- QC 20111130
- We present a low temperature (< 37°C) wafer-scale microfluidic batch packaging process using covalent, dry bonding of offstoichiometry thiol-ene polymers (OSTE), enabling rapid, bio-compatible integration of fluidics on wafer-scale in combination with excellent polymer properties.
Subject headings and genre
- TEKNIK OCH TEKNOLOGIER Elektroteknik och elektronik Annan elektroteknik och elektronik hsv//swe
- ENGINEERING AND TECHNOLOGY Electrical Engineering, Electronic Engineering, Information Engineering Other Electrical Engineering, Electronic Engineering, Information Engineering hsv//eng
- TEKNIK OCH TEKNOLOGIER Kemiteknik Polymerteknologi hsv//swe
- ENGINEERING AND TECHNOLOGY Chemical Engineering Polymer Technologies hsv//eng
- Biocompatible
- Off-stoichiometry thiol-ene (OSTE)
- Packaging
- Wafer-scale bonding
Added entries (persons, corporate bodies, meetings, titles ...)
- Saharil, FarizahKTH,Mikrosystemteknik(Swepub:kth)u1481q3i (author)
- Haraldsson, TommyKTH,Mikrosystemteknik(Swepub:kth)u1ohdrr6 (author)
- Wijngaart, Wouter van derKTH,Mikrosystemteknik(Swepub:kth)u1wdbont (author)
- KTHMikrosystemteknik (creator_code:org_t)
Related titles
- In:15th International Conference on Miniaturized Systems for Chemistry and Life Sciences (microTAS 2011), s. 1143-11459781618395955
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