RELIABLE BATCH MANUFACTURING OF MINIATURIZED VERTICAL VIAS IN SOFT POLYMER REPLICA MOLDING

• We introduce and have successfully tested an uncomplicated polydimethylsiloxane (PDMS) compatible method for batch manufacturing vertical microfluidic interconnects via a surface inhibition of cationic photopolymerization. The yield of the maskless method is 100%. Moreover, the method enhances bond strength with subsequently laminated polymer layers.

Subject headings

TEKNIK OCH TEKNOLOGIER  -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)

TEKNIK OCH TEKNOLOGIER  -- Kemiteknik -- Polymerteknologi (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Chemical Engineering -- Polymer Technologies (hsv//eng)

Keyword

pdms

interconnects

photopolymerization

inhibition

Publication and Content Type

ref (subject category)

kon (subject category)