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Comparison of metal...
Comparison of metal gate electrodes on MOCVD HfO2
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- Lemme, Max C., 1970- (author)
- AMO GmbH, AMICA, Aachen, Germany
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Efavi, J. K. (author)
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Gottlob, H. D. B. (author)
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Mollenhauer, T. (author)
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Wahlbrink, T. (author)
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Kurz, H. (author)
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(creator_code:org_t)
- Elsevier BV, 2005
- 2005
- English.
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In: Microelectronics and reliability. - : Elsevier BV. - 0026-2714 .- 1872-941X. ; 45:5-6, s. 953-956
- Related links:
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Subject headings
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- Metal gate electrodes of sputtered aluminum (At), titanium nitride (TiN) and nickel aluminum nitride (NiAlN) are investigated in this work. They are compared with respect to their compatibility with metal organic chemical vapor deposited (MOCVD) hafnium dioxide (HfO2) gate dielectrics. TiN, with a midgap work function of 4.65 eV on SiO2, exhibits promising characteristics as metal gate on HfO2. In addition, encouraging results are presented for the ternary metal NiAlN, whereas classic At electrodes are found unstable in conjunction with HfO2.
Subject headings
- TEKNIK OCH TEKNOLOGIER -- Nanoteknik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Nano-technology (hsv//eng)
Publication and Content Type
- ref (subject category)
- art (subject category)
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