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Leakage current eff...
Leakage current effects on C-V plots of high-k metal-oxide-semiconductor capacitors
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- Lu, Y. (author)
- University of Liverpool
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- Hall, S. (author)
- University of Liverpool
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- Tan, L. Z. (author)
- University of Liverpool
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- Mitrovic, I. Z. (author)
- University of Liverpool
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- Davey, W. M. (author)
- University of Liverpool
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- Raeissi, Bahman, 1979 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Engström, Olof, 1943 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Cherkaoui, K. (author)
- Tyndall National Institute at National University of Ireland, Cork
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- Monaghan, S. (author)
- Tyndall National Institute at National University of Ireland, Cork
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- Hurley, P. K. (author)
- Tyndall National Institute at National University of Ireland, Cork
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Gottlob, H. D. B. (author)
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- Lemme, Max C., 1970- (author)
- AMO GmbH, AMICA, Aachen, Germany
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(creator_code:org_t)
- American Vacuum Society, 2009
- 2009
- English.
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In: Journal of Vacuum Science & Technology B. - : American Vacuum Society. - 1071-1023 .- 1520-8567 .- 2166-2754 .- 2166-2746. ; 27:1, s. 352-355
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Abstract
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- With the employment of ultrathin, high dielectric constant gate materials in advanced semiconductor technology, the conventional capacitance-voltage measurement technique exhibits a series of anomalies. In particular, a nonsaturating increase in the accumulation capacitance with reducing measurement frequency is frequently observed, which has not been adequately explained to our knowledge. In this article, the authors provide an explanation for this anomaly and hence set a criterion for the lower bound on measurement frequency. We then present a model which allows the easy extraction of the required parameters and apply it to an experimental set of data.
Subject headings
- TEKNIK OCH TEKNOLOGIER -- Nanoteknik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Nano-technology (hsv//eng)
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Publication and Content Type
- ref (subject category)
- art (subject category)
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- By the author/editor
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Lu, Y.
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Hall, S.
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Tan, L. Z.
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Mitrovic, I. Z.
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Davey, W. M.
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Raeissi, Bahman, ...
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show more...
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Engström, Olof, ...
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Cherkaoui, K.
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Monaghan, S.
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Hurley, P. K.
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Gottlob, H. D. B ...
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Lemme, Max C., 1 ...
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- About the subject
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- ENGINEERING AND TECHNOLOGY
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ENGINEERING AND ...
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and Nano technology
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- ENGINEERING AND TECHNOLOGY
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ENGINEERING AND ...
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and Electrical Engin ...
- Articles in the publication
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Journal of Vacuu ...
- By the university
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Royal Institute of Technology
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Chalmers University of Technology