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Leakage current eff...
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Lu, Y.University of Liverpool
(author)
Leakage current effects on C-V plots of high-k metal-oxide-semiconductor capacitors
- Article/chapterEnglish2009
Publisher, publication year, extent ...
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American Vacuum Society,2009
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printrdacarrier
Numbers
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LIBRIS-ID:oai:DiVA.org:kth-50557
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https://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-50557URI
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https://doi.org/10.1116/1.3025910DOI
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https://research.chalmers.se/publication/92390URI
Supplementary language notes
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Language:English
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Summary in:English
Part of subdatabase
Classification
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Subject category:ref swepub-contenttype
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Subject category:art swepub-publicationtype
Notes
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QC 20120227
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With the employment of ultrathin, high dielectric constant gate materials in advanced semiconductor technology, the conventional capacitance-voltage measurement technique exhibits a series of anomalies. In particular, a nonsaturating increase in the accumulation capacitance with reducing measurement frequency is frequently observed, which has not been adequately explained to our knowledge. In this article, the authors provide an explanation for this anomaly and hence set a criterion for the lower bound on measurement frequency. We then present a model which allows the easy extraction of the required parameters and apply it to an experimental set of data.
Subject headings and genre
Added entries (persons, corporate bodies, meetings, titles ...)
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Hall, S.University of Liverpool
(author)
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Tan, L. Z.University of Liverpool
(author)
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Mitrovic, I. Z.University of Liverpool
(author)
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Davey, W. M.University of Liverpool
(author)
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Raeissi, Bahman,1979Chalmers tekniska högskola,Chalmers University of Technology(Swepub:cth)raeissin
(author)
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Engström, Olof,1943Chalmers tekniska högskola,Chalmers University of Technology(Swepub:cth)oleng
(author)
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Cherkaoui, K.Tyndall National Institute at National University of Ireland, Cork
(author)
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Monaghan, S.Tyndall National Institute at National University of Ireland, Cork
(author)
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Hurley, P. K.Tyndall National Institute at National University of Ireland, Cork
(author)
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Gottlob, H. D. B.
(author)
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Lemme, Max C.,1970-AMO GmbH, AMICA, Aachen, Germany(Swepub:kth)u1m2eozy
(author)
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University of LiverpoolChalmers tekniska högskola
(creator_code:org_t)
Related titles
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In:Journal of Vacuum Science & Technology B: American Vacuum Society27:1, s. 352-3551071-10231520-85672166-27542166-2746
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Lu, Y.
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Hall, S.
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Tan, L. Z.
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Mitrovic, I. Z.
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Davey, W. M.
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Raeissi, Bahman, ...
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Engström, Olof, ...
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Cherkaoui, K.
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Monaghan, S.
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Hurley, P. K.
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Gottlob, H. D. B ...
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Lemme, Max C., 1 ...
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Royal Institute of Technology
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Chalmers University of Technology