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Nano-fabrication of...
Nano-fabrication of condenser and micro zone plates for compact X-ray microscopy
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- Holmberg, Anders (author)
- KTH,Fysik
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- Rehbein, Stefan (author)
- KTH,Fysik
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- Hertz, Hans M. (author)
- KTH,Fysik
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(creator_code:org_t)
- 2004
- 2004
- English.
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In: Microelectronic Engineering. - 0167-9317 .- 1873-5568. ; 73/74, s. 639-643
- Related links:
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Subject headings
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- We demonstrate nano-fabrication of high-aspect ratio and high-spatial frequency diffractive X-ray optics with high uniformity for use in a laser-plasma-based compact water-window X-ray microscope. The structures are fabricated on 50 nm thin Si3N4-membranes using a three-layer resist scheme and 30 keV e-beam lithography in combination with reactive ion etching and nickel electroplating. The process is developed on solely commercially available resists and instruments. As examples, we demonstrate fabrication of micro-zone plates with outermost linewidths of 30 nm and an uniform zone height of 160 nm, and a 4.5 mm diameter condenser zone plate with 50-60 nm lines, fabricated by using stitched fields.
Subject headings
- NATURVETENSKAP -- Fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences (hsv//eng)
Keyword
- Physics
- Fysik
Publication and Content Type
- ref (subject category)
- art (subject category)
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