How reliable are surface roughness measurements of micro-features? : Experiences of a Round Robin test within nine 4M laboratories

• Surface roughness of tiny micro machined features is not easy to verify. The statistical variation of the surface itself can be the limiting factor that hampers tolerance verification. In this paper we have studied this effect and we also test the performance of 10 different surface profilers over a very well specified surface area. For this area 6 profilers yielded the same result within a standard deviation window of ±6%. For other areas, on top of narrow bars and in narrow and deep channels, a much larger spread in the Round Robin results were found.

Subject headings

TEKNIK OCH TEKNOLOGIER  -- Nanoteknik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Nano-technology (hsv//eng)

TEKNIK OCH TEKNOLOGIER  -- Maskinteknik -- Produktionsteknik, arbetsvetenskap och ergonomi (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Mechanical Engineering -- Production Engineering, Human Work Science and Ergonomics (hsv//eng)

Keyword

Surface roughness

Micro metrology

Round robin

Surface profile

Ra

Pa

SRA - Production

SRA - Produktion

Publication and Content Type

ref (subject category)

kon (subject category)