onr:"swepub:oai:DiVA.org:kth-83025"
Search: onr:"swepub:oai:DiVA.org:kth-83025" > Topography dependen...
- 1 of 1
- Previous record
- Next record
- To hitlist
Topography dependent doping distribution in selectively regrown InP studied by scanning capacitance microscopy
-
- Hammar, M. (author)
- KTH,Elektronik
- Rodriguez Messmer, E. (author)
- Luzuy, M. (author)
- show more...
- Anand, S. (author)
- Lourdudoss, S. (author)
- Landgren, G. (author)
- show less...
- (creator_code:org_t)
- AIP Publishing, 1998
- 1998
- English.
- In: Applied Physics Letters. - : AIP Publishing. - 0003-6951 .- 1077-3118. ; 72:7, s. 815-817
- Journal article (peer-reviewed)
Abstract
Subject headings
Close
- We have used scanning capacitance microscopy (SCM) to study the dopant distribution in regrown InP with high sensitivity and spatial resolution. Sulfur or iron doped InP was selectively regrown around n-doped InP mesas using hydride vapor phase epitaxy, and the resulting structure was imaged in cross section by SCM. For calibration purposes, reference layers with known doping levels were grown directly on top of the region of interest. Dramatic variations in the carrier concentration around the mesa, as well as pronounced differences in the behavior of S and Fe are observed. We correlate these findings to the growth and doping incorporation mechanisms. © 1998 American Institute of Physics.
Subject headings
- NATURVETENSKAP -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Condensed Matter Physics (hsv//eng)
Publication and Content Type
- ref (subject category)
- art (subject category)
Find in a library
- Applied Physics Letters (Search for host publication in LIBRIS)
To the university's database
- 1 of 1
- Previous record
- Next record
- To hitlist
Find more in SwePub
- By the author/editor
- Hammar, M.
- Rodriguez Messme ...
- Luzuy, M.
- Anand, S.
- Lourdudoss, S.
- Landgren, G.
- About the subject
-
- NATURAL SCIENCES
- NATURAL SCIENCES
- and Physical Science ...
- and Condensed Matter ...
- Articles in the publication
- Applied Physics ...
- By the university
- Royal Institute of Technology
Search outside SwePub
- Extend your search to:
- Google Book Search
- Google Scholar
Kungliga biblioteket hanterar dina personuppgifter i enlighet med EU:s dataskyddsförordning (2018), GDPR. Läs mer om hur det funkar här.
Så här hanterar KB dina uppgifter vid användning av denna tjänst.
- Copyright © LIBRIS - National Library Systems
- LIBRIS.kb.se
