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SiC MISFETs with MB...
SiC MISFETs with MBE-grown AlN gate dielectric
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- Zetterling, Carl-Mikael (author)
- KTH,Integrerade komponenter och kretsar
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- Östling, Mikael (author)
- KTH,Integrerade komponenter och kretsar
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Yano, H. (author)
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Kimoto, T. (author)
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Matsunami, H. (author)
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Linthicum, K. (author)
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Davis, R. F. (author)
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(creator_code:org_t)
- Trans Tech Publications Inc. 2000
- 2000
- English.
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In: Materials Science Forum. - : Trans Tech Publications Inc.. - 0255-5476 .- 1662-9752. ; 338-342, s. 1315-1318
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Abstract
Subject headings
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- Metal-Insulator-Semiconductor Field Effect Transistors (MISFETs) with ion implanted source and drain junctions have been made in 6H silicon carbide (SiC). Aluminum nitride (AlN) was used as the insulating gate dielectric, and was grown using molecular beam epitaxy (MBE). Gate controlled transistor operation was shown with an inversion layer mobility of 10-20 cm2/Vs. However, due to relaxation of the AlN film, the gate leakage was excessive, which precluded a thorough investigation of the transistor characteristics. This paper describes the manufacturing process and current voltage characteristics, and an improved process sequence is also proposed.
Subject headings
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Keyword
- Carrier mobility
- Current voltage characteristics
- Dielectric films
- Ion implantation
- Leakage currents
- Molecular beam epitaxy
- Relaxation processes
- Semiconducting aluminum compounds
- Semiconductor junctions
- Silicon carbide
- Substrates
- Gate dielectrics
- Inversion layer mobility
- MISFET devices
Publication and Content Type
- ref (subject category)
- art (subject category)
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