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Single-shot extreme ultraviolet laser imaging of nanostructures with wavelength resolution

Brewer, Courtney A. (author)
Brizuela, Fernando (author)
Wachulak, Przemyslaw (author)
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Martz, Dale H. (author)
Natl. Science Foundation Engineering Research Center for Extreme Ultraviolet Science and Technology, Colorado State University
Chao, Weilun (author)
Anderson, Erik H. (author)
Attwood, David T. (author)
Vinogradov, Alexander V. (author)
Artyukov, Igor A. (author)
Ponomareko, Alexander G. (author)
Kondratenko, Valeriy V. (author)
Marconi, Mario C. (author)
Rocca, Jorge J. (author)
Menoni, Carmen S. (author)
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Natl Science Foundation Engineering Research Center for Extreme Ultraviolet Science and Technology, Colorado State University (creator_code:org_t)
Optical Society of America, 2008
2008
English.
In: Optics Letters. - : Optical Society of America. - 0146-9592 .- 1539-4794. ; 33:5, s. 518-520
  • Journal article (peer-reviewed)
Abstract Subject headings
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  • We have demonstrated near-wavelength resolution microscopy in the extreme ultraviolet. Images of 50 nm diameter nanotubes were obtained with a single ~1 ns duration pulse from a desktop-size 46.9 nm laser. We measured the modulation transfer function of the microscope for three different numerical aperture zone plate objectives, demonstrating that 54 nm half-period structures can be resolved. The combination of near-wavelength spatial resolution and high temporal resolution opens myriad opportunities in imaging, such as the ability to directly investigate dynamics of nanoscale structures.

Subject headings

NATURVETENSKAP  -- Fysik -- Atom- och molekylfysik och optik (hsv//swe)
NATURAL SCIENCES  -- Physical Sciences -- Atom and Molecular Physics and Optics (hsv//eng)

Keyword

SRA - E-vetenskap (SeRC)
SRA - E-Science (SeRC)

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