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Metal-oxide-semicon...
Metal-oxide-semiconductor structures in inductively coupled plasma etch damaged 6H- and 4H-SiC
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Koo, S.-M. (author)
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Lee, S.-K. (author)
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- Zetterling, Carl-Mikael (author)
- KTH,Integrerade komponenter och kretsar
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- Östling, Mikael (author)
- KTH,Integrerade komponenter och kretsar
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(creator_code:org_t)
- 2001
- 2001
- English.
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In: 32nd IEEE Semiconductor Interface Specialists Conference, 2001.
- Related links:
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https://urn.kb.se/re...
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Subject headings
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
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