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High spatial resolu...
High spatial resolution full-field microscopy using a desktop-size soft x-ray laser
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Brewer, Courtney A. (author)
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Brizuela, Fernando (author)
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- Martz, Dale (author)
- NSF ERC for Extreme Ultraviolet Science and Technology, Department of Electrical and Computer Engineering, Colorado State University
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Vaschenko, Georgiy (author)
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Marconi, Mario C. (author)
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Chao, Weilun (author)
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Anderson, Erik H. (author)
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Attwood, David T. (author)
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Vinogradov, Alexander V. (author)
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Artioukov, Igor A. (author)
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Pershyn, Yuriy P. (author)
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Kondratenko, Valeriy V. (author)
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Rocca, Jorge J. (author)
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Menoni, Carmen S. (author)
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(creator_code:org_t)
- SPIE, 2007
- 2007
- English.
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In: Proceedings of SPIE. - : SPIE.
- Related links:
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Subject headings
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- Images with nanoscale resolution were obtained in both transmission and reflection modes using a full-field microscope that is illuminated by an extremely compact λ = 46.9 nm (hv = 26.4 eV) soft x-ray laser. The microscope was used to image the surface of partially processed silicon semiconductor chips containing periodic patterns of polysilicon and metal lines. To characterize the microscope, modulation transfer functions were experimentally built for three different objective zone plates, and images with near-wavelength resolution were obtained.
Subject headings
- NATURVETENSKAP -- Biologi (hsv//swe)
- NATURAL SCIENCES -- Biological Sciences (hsv//eng)
- TEKNIK OCH TEKNOLOGIER -- Annan teknik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Other Engineering and Technologies (hsv//eng)
Keyword
- Imaging
- Microscopy
- Soft x-ray laser
- Zone plates
Publication and Content Type
- ref (subject category)
- kon (subject category)
To the university's database
- By the author/editor
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Brewer, Courtney ...
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Brizuela, Fernan ...
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Martz, Dale
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Vaschenko, Georg ...
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Marconi, Mario C ...
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Chao, Weilun
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show more...
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Anderson, Erik H ...
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Attwood, David T ...
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Vinogradov, Alex ...
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Artioukov, Igor ...
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Pershyn, Yuriy P ...
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Kondratenko, Val ...
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Rocca, Jorge J.
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Menoni, Carmen S ...
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show less...
- About the subject
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- NATURAL SCIENCES
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NATURAL SCIENCES
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and Biological Scien ...
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- ENGINEERING AND TECHNOLOGY
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ENGINEERING AND ...
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and Other Engineerin ...
- Articles in the publication
- Proceedings of S ...
- By the university
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Royal Institute of Technology