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Nanometer-scale imaging and ablation with Extreme Ultraviolet lasers

Menoni, C. S. (author)
Brizuela, F. (author)
Brewer, C. (author)
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Bravo, H. (author)
Langdon, B. (author)
Berrill, M. (author)
Martz, Dale (author)
Colorado State University
Vaschenko, G. (author)
Marconi, M. C. (author)
Rocca, J. J. (author)
Chao, W. (author)
Anderson, E. H. (author)
Attwood, D. T. (author)
Vinogradov, A. V. (author)
Artioukov, I. A. (author)
Pershyn, Y. P. (author)
Kondratenko, V. V. (author)
Hemberg, O. (author)
Frazer, B. (author)
Bloom, S. (author)
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 (creator_code:org_t)
2007
2007
English.
In: 2007 CONFERENCE ON LASERS & ELECTRO-OPTICS/QUANTUM ELECTRONICS AND LASER SCIENCE CONFERENCE (CLEO/QELS 2007), VOLS 1-5. - 9781424435906 ; , s. 1401-1402
  • Conference paper (peer-reviewed)
Abstract Subject headings
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  • The short wavelength and high brightness of compact extreme ultraviolet lasers is shown to enable the development of microscopes with spatial resolution of tens of nanometers and new types of nanoprobes.

Subject headings

TEKNIK OCH TEKNOLOGIER  -- Annan teknik (hsv//swe)
ENGINEERING AND TECHNOLOGY  -- Other Engineering and Technologies (hsv//eng)

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kon (subject category)

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