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3D Patterning of Si...
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Fischer, Andreas C.,1982-KTH,Mikrosystemteknik
(author)
3D Patterning of Si Micro and Nano Structures by Focused Ion Beam Implantation, Si Deposition and Selective Si Etching
- Article/chapterEnglish2012
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LIBRIS-ID:oai:DiVA.org:kth-91425
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https://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-91425URI
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Subject category:vet swepub-contenttype
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Subject category:kon swepub-publicationtype
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Gylfason, Kristinn B.KTH,Mikrosystemteknik(Swepub:kth)u1v3y7u7
(author)
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Belova, Liubov M.KTH,Tillämpad materialfysik(Swepub:kth)u15bf6fe
(author)
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Malm, Gunnar B.KTH,Integrerade komponenter och kretsar(Swepub:kth)u13lag9j
(author)
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Kolahdouz, MohammadrezaKTH,Integrerade komponenter och kretsar(Swepub:kth)u1cet9aw
(author)
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Rikers, Yuri G.M.FEI Electron Optics
(author)
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Stemme, GöranKTH,Mikrosystemteknik(Swepub:kth)u1oyebfq
(author)
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Niklaus, FrankKTH,Mikrosystemteknik(Swepub:kth)u1bcu8r2
(author)
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KTHMikrosystemteknik
(creator_code:org_t)
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