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3D Patterning of Si Micro and Nano Structures by Focused Ion Beam Implantation, Si Deposition and Selective Si Etching
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- Fischer, Andreas C., 1982- (author)
- KTH,Mikrosystemteknik
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- Gylfason, Kristinn B. (author)
- KTH,Mikrosystemteknik
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- Belova, Liubov M. (author)
- KTH,Tillämpad materialfysik
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- 2012
- 2012
- English.
- Conference paper (other academic/artistic)
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- kon (subject category)
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- Fischer, Andreas ...
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- Stemme, Göran
- Niklaus, Frank
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- Royal Institute of Technology
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