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Fabrication and tra...
Fabrication and transfer of fragile 3D PDMS microstructures
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- Karlsson, J. Mikael, 1982- (author)
- KTH,Mikrosystemteknik
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- Haraldsson, Tommy (author)
- KTH,Mikrosystemteknik
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- Carlborg, Carl Fredrik (author)
- KTH,Mikrosystemteknik
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- Hansson, Jonas (author)
- KTH,Cellens fysik
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- Russom, Aman (author)
- KTH,Nanobioteknologi
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- van der Wijngaart, Wouter (author)
- KTH,Mikrosystemteknik
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(creator_code:org_t)
- 2012-07-04
- 2012
- English.
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In: Journal of Micromechanics and Microengineering. - : IOP Publishing. - 0960-1317 .- 1361-6439. ; 22:8, s. 1-9
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https://kth.diva-por... (primary) (Raw object)
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http://kth.diva-port...
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Subject headings
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- We present a method for PDMS microfabrication of fragile membranes and 3D fluidic networks, using a surface modified water-dissolvable release material, poly(vinyl alcohol), as a tool for handling, transfer and release of fragile polymer microstructures. The method is well suited for the fabrication of complex multilayer microfluidic devices, here shown for a PDMS device with a thin gas permeable membrane and closely spaced holes for vertical interlayer connections fabricated in a single layer. To the authors knowledge, this constitutes the most advanced PDMS fabrication method for the combination of thin, fragile structures and 3D fluidics networks, and hence a considerable step in the direction of making PDMS fabrication of complex microfluidic devices a routine endeavour.
Subject headings
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Keyword
- Microfluidic Devices
- Layer
Publication and Content Type
- ref (subject category)
- art (subject category)
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