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High-power impulse ...
High-power impulse magnetron sputtering of Ti-Si-C thin films from a Ti3SiC2 compound target
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- Alami, Jones (author)
- Linköpings universitet,Plasma och ytbeläggningsfysik,Tekniska högskolan
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- Eklund, Per (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan
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- Emmerlich, Jens (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan
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- Wilhelmsson, Ola (author)
- Uppsala universitet,Oorganisk kemi,Department of Materials Chemistry, The Ångström Laboratory, Uppsala University, Uppsala, Sweden
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- Jansson, Ulf (author)
- Uppsala universitet,Oorganisk kemi,Department of Materials Chemistry, The Ångström Laboratory, Uppsala University, Uppsala, Sweden
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- Högberg, Hans (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan
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- Hultman, Lars (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan
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- Helmersson, Ulf (author)
- Linköpings universitet,Plasma och ytbeläggningsfysik,Tekniska högskolan
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(creator_code:org_t)
- Institutionen för fysik, kemi och biologi, 2006
- 2006
- English.
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In: Thin Solid Films. - : Institutionen för fysik, kemi och biologi. - 0040-6090 .- 1879-2731. ; 515:4, s. 1731-1736
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Abstract
Subject headings
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- We have deposited Ti-Si-C thin films using high-power impulse magnetron sputtering (HIPIMS) from a Ti3SiC2 compound target. The as-deposited films were composite materials with TiC as the main crystalline constituent. X-ray diffraction and photoelectron spectroscopy indicated that they also contained amorphous SiC, and for films deposited on inclined substrates, crystalline Ti5Si3Cx. The film morphology was dense and flat, while films deposited with dc magnetron sputtering under comparable conditions were rough and porous. Due to the high degree of ionization of the sputtered species obtained in HIPIMS, it is possible to control the film composition, in particular the C content, by tuning the substrate inclination angle, the Ar process pressure, and the bias voltage.
Subject headings
- NATURVETENSKAP -- Fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences (hsv//eng)
- NATURVETENSKAP -- Kemi -- Oorganisk kemi (hsv//swe)
- NATURAL SCIENCES -- Chemical Sciences -- Inorganic Chemistry (hsv//eng)
Keyword
- HIPIMS
- Titanium silicon carbide
- Physics
- Fysik
- Inorganic chemistry
Publication and Content Type
- ref (subject category)
- art (subject category)
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